S. Chikaki: search on Z-Library

Fundraising September 15, 2024 – October 1, 2024 About fundraising

The world's largest scientific articles store. 70,000,000+ articles for free.

Fundraising September 15, 2024 – October 1, 2024

Z-Library is one of the largest online libraries in the world that contains over 17,000,000 books and 84,837,000 articles. We aim to make literature accessible to everyone. Today (September 15, 2024) we've started additional fundraising to project maintenance and development.

Also UNLIMITED downloads (for 31 days after the day of making donation) are available for ALL contributors who will donate during the fundraising period till October 1, 2024.

About fundraisingRead more

Make a donation

1

Infrared spectroscopic analysis of siloxane network modification of mesoporous silica film by silylation and cesium doping

Yasuhsia Kayaba, Kazuo Kohmura, Hirofumi Tanaka, Yutaka Seino, Toshiyuki Ohdaira, Shinichi Chikaki, Takamaro Kikkawa

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 575 KB

english, 2010

2

[Ultra Clean Soc ISSM2000. Ninth International Symposium on Semiconductor Manufacturing - Tokyo, Japan (26-28 Sept. 2000)] Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) - High controllability and low cost APM process by one-bath type wet-bench for multi gate oxide pre-cleaning

Suzuki, T., Kunishima, H., Wake, T., Chikaki, S.

Year:

2000

Language:

english

File:

PDF, 550 KB

english, 2000

3

[IEEE IEEE 2005 International Interconnect Technology Conference - Burlingame, CA, USA (6-8 June 2005)] Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005. - Hybrid low-k/Cu dual damascene process for 45-32 nm technology node using self-assembled porous-silica ultra low-k films

Chikaki, S., Shimoyama, A., Yagi, R., Yoshino, T., Ono, T., Ishikawa, A., Fujii, N., Hata, N., Nakayama, T., Kohmura, K., Tanaka, H., Goto, T., Kawahara, J., Sonoda, Y., Matsuo, H., Seino, Y., Takada,

Year:

2005

Language:

english

File:

PDF, 551 KB

english, 2005

4

[IEEE 2011 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2011.04.10-2011.04.14)] 2011 International Reliability Physics Symposium - Electrical reliabilities of porous silica low-k films

Kikkawa, Takamaro, Kayaba, Yasuhisa, Kohmura, Kazuo, Chikaki, Shinichi

Year:

2011

Language:

english

File:

PDF, 1.51 MB

english, 2011

5

Magnetic nanoparticle detection by utilizing nonlinear magnetization for sentinel lymph nodes of breast cancer patients

Kuwahata, Akihiro, Taruno, Kanae, Kurita, Tomoko, Makita, Masujiro, Chikaki, Shinichi, Saito, Itsuro, Takei, Hiroyuki, Nakamura, Seigo, Kusakabe, Moriaki, Sekino, Masaki

Journal:

IEEE Transactions on Magnetics

Year:

2020

File:

PDF, 507 KB

2020

6

Extremely slow reorientation dynamics of molecular tracers in glassy polymers

Qui Tran-Cong, Hirotaka Kanato, Shinya Chikaki

Journal:

Journal of Molecular Liquids

Year:

1995

Language:

english

File:

PDF, 306 KB

english, 1995

7

Removal of etching/ashing residues and ashing/wet-clean damage in porous silica low-k films

T. Yamanishi, T. Ono, K. Kohmura, N. Fujii, T. Nakayama, H. Tanaka, S. Chikaki, T. Kikkawa

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 694 KB

english, 2006

8

LDL apheresis followed by corticosteroid therapy as a possible treatment of cholesterol crystal embolism

S. Daimon, R. Motita, N. Ohtsuki, H. Chikaki, K. Jigen, I. Koni

Journal:

Clinical and Experimental Nephrology

Year:

2000

Language:

english

File:

PDF, 363 KB

english, 2000

9

Relationship between reorientational motions of a photochromic dopant and local relaxation processes of a glassy polymer matrix

Qui Tran-Cong, Shinya Chikaki, Hirotaka Kanato

Journal:

Year:

1994

Language:

english

File:

PDF, 457 KB

english, 1994

10

A new cobalt salicide technology for 0.15-μm CMOS devices

Inoue, K., Mikagi, K., Abiko, H., Chikaki, S., Kikkawa, T.

Journal:

IEEE Transactions on Electron Devices

Year:

1998

Language:

english

File:

PDF, 290 KB

english, 1998

11

Total Performance of 32-nm-Node Ultralow-/Cu Dual-Damascene Interconnects Featuring Short-TAT Silylated Porous Silica

Oda, N., Chikaki, S., Kubota, T., Nakao, S., Tomioka, K., Soda, E., Nakamura, N., Gawase, A., Nogawa, J., Kawashima, Y., Hayashi, R., Suzuki, T., Saito, S.

Journal:

IEEE Transactions on Electron Devices

Year:

2010

Language:

english

File:

PDF, 1.57 MB

english, 2010

12

Targeting with oligomannose-coated liposomes promotes maturation and splenic trafficking of dendritic cells in the peritoneal cavity

Mariko Ishii, Chikaki Kato, Ayumi Hakamata, Naoya Kojima

Journal:

International Immunopharmacology

Year:

2011

Language:

english

File:

PDF, 1.03 MB

english, 2011

13

[IEEE 2009 IEEE International Interconnect Technology Conference - IITC - Sapporo, Japan (2009.06.1-2009.06.3)] 2009 IEEE International Interconnect Technology Conference - Packaging characteristics of 6-layer ultra low-k/Cu dual damascene interconnect featuring advanced scalable porous silica (k=2.1)

Chikaki, S., Soda, E., Gawase, A., Suzuki, T., Kawashima, Y., Oda, N., Saito, S.

Year:

2009

Language:

english

File:

PDF, 781 KB

english, 2009

14

[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - Feasibility study of 70nm pitch Cu/porous low-k D/D integration featuring EUV lithography toward 22nm generation

Nakamura, N., Oda, N., Soda, E., Hosoi, N., Gawase, A, Aoyama, H., Tanaka, Y., Kawamura, D., Chikaki, S., Shiohara, M., Tarumi, N., Kondo, S., Mori, I., Saito, S.

Year:

2009

Language:

english

File:

PDF, 1.68 MB

english, 2009

15

[Widerkehr & Associates 1996 Symposium on VLSI Technology. Digest of Technical Papers - Honolulu, HI, USA (11-13 June 1996)] 1996 Symposium on VLSI Technology. Digest of Technical Papers - A new two-step metal-CMP technique for a high performance multilevel interconnects featured by Al- and "Cu in low ε, organic film"-metallizations

Hayashi, Y., Onodera, T., Nakajima, T., Kikuta, K., Tsuchiya, Y., Kawahara, J., Takahashi, S., Ueno, K., Chikaki, S.

Year:

1996

Language:

english

File:

PDF, 245 KB

english, 1996

16

[IEEE International Electron Devices Meeting. Technical Digest - San Francisco, CA, USA (8-11 Dec. 1996)] International Electron Devices Meeting. Technical Digest - Barrier metal free copper damascene interconnection technology using atmospheric copper reflow and nitrogen doping in SiOF film

Mikagi, K., Ishikawa, H., Usami, T., Suzuki, M., Inoue, K., Oda, N., Chikaki, S., Sakai, I., Kikkawa, T.

Year:

1996

Language:

english

File:

PDF, 444 KB

english, 1996

17

[IEEE 2008 International Interconnect Technology Conference - IITC - Burlingame, CA, USA (2008.06.1-2008.06.4)] 2008 International Interconnect Technology Conference - Analytical Study of leakage characteristics change during multilevel interconnect process using porogen-type porous SiOC (k=2.4)/Cu system

Ohashi, N., Nakahira, J., Soda, E., Tomioka, K., Chikaki, S., Oda, N., Kondo, S., Saito, S.

Year:

2008

Language:

english

File:

PDF, 443 KB

english, 2008

18

[IEEE Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Kyoto, Japan (June 14-16, 2005)] Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Control of process-induced damages in self-assembled porous silica /Cu damascene interconnects for 45nm node and beyond

Yagi, R., Chikaki, S., Shimoyama, M., Yoshino, T., Ono, T., Ishikawa, A., Fujii, N., Hata, N., Nakayama, T., Kohmura, K., Tanaka, H., Goto, T., Kawahara, J., Sonoda, Y., Matsuo, H., Seino, Y., Kinoshi

Year:

2005

Language:

english

File:

PDF, 5.01 MB

english, 2005

19

[IEEE International Electron Devices Meeting. Technical Digest - San Francisco, CA, USA (8-11 Dec. 1996)] International Electron Devices Meeting. Technical Digest - A novel TiN/Ti contact plug technology for gigabit scale DRAM using Ti-PECVD and TiN-LPCVD

Ohto, K., Urabe, K., Taguwa, T., Chikaki, S., Kikkawa, T.

Year:

1996

Language:

english

File:

PDF, 616 KB

english, 1996

20

[IEEE IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Tempe, Arizon, USA (Dec. 5, 2005)] IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Advanced scalable ultralow-k/cu interconnect technology for 32 nm CMOS ULSI using self-assembled porous silica and self-aligned CoWP barrier

Kikkawa, T., Chikaki, S., Yagi, R., Shimoyama, M., Shishida, Y., Fujii, N., Kohmura, K., Tanaka, H., Nakayama, T., Hishiya, S., Ono, T., Yamanishi, T., Ishikawa, A., Matsuo, H., Seino, Y., Hata, N., Y

Year:

2005

Language:

english

File:

PDF, 1.11 MB

english, 2005

21

Growth of TiSi[sub 2] from codeposited TiSi[sub x] layers and interfacial layers

Tung, R. T., Fujii, K., Kikuta, K., Chikaki, S., Kikkawa, T.

Journal:

Applied Physics Letters

Year:

1997

Language:

english

File:

PDF, 535 KB

english, 1997

22

[IEEE International Electron Devices Meeting. Technical Digest - San Francisco, CA, USA (8-11 Dec. 1996)] International Electron Devices Meeting. Technical Digest - A thermally stable Ti-W salicide for deep-submicron logic with embedded DRAM

Fujii, K., Kikuta, K., Inoue, K., Mikagi, K., Chikaki, S., Kikkawa, T.

Year:

1996

Language:

english

File:

PDF, 700 KB

english, 1996

23

[IEEE 2008 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2008.12.15-2008.12.17)] 2008 IEEE International Electron Devices Meeting - Comprehensive study of 32 nm node ultralow-k/Cu (keff=2.6) dual damascene integration featuring short TAT silylated porous silica (k=2.1)

Oda, N., Chikaki, S., Kubota, T., Nakao, S., Tomioka, K., Soda, E., Nakamura, N., Nogawa, J., Kawashima, Y., Hayashi, R., Saito, S.

Year:

2008

Language:

english

File:

PDF, 1.15 MB

english, 2008

24

[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - 32 nm node Ultralow-k(k=2.1)/Cu Damascene Multilevel Interconnect using High-Porosity (50 %) High-Modulus (9 GPa) Self-Assembled Porous Silica

Chikaki, S., Kinoshita, K., Nakayama, T., Kohmura, K., Tanaka, H., Hirakawa, M., Soda, E., Seino, Y., Hata, N., Kikkawa, T., Saito, S.

Year:

2007

Language:

english

File:

PDF, 3.19 MB

english, 2007

25

[IEEE International Electron Devices Meeting. IEDM Technical Digest - Washington, DC, USA (7-10 Dec. 1997)] International Electron Devices Meeting. IEDM Technical Digest - Dual-damascene interconnects with 0.28 μm vias using in situ copper doped aluminum chemical vapor deposition

Sugai, K., Chikaki, S., Nakajima, T., Kikkawa, T.

Year:

1997

Language:

english

File:

PDF, 716 KB

english, 1997

26

[IEEE ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. - San Jose, CA, USA (2005.09.13-2005.09.15)] ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. - Extraction of process-induced damage in low-k/Cu damascene structure

Chikaki, S., Shimoyama, M., Yagi, R., Yoshino, T., Shishida, Y., Ono, T., Ishikawa, A., Fujii, N., Nakayama, T., Kohmura, K., Tanaka, H., Kawahara, J., Matsuo, H., Takada, S., Yamanishi, T., Hishiya,

Year:

2005

Language:

english

File:

PDF, 962 KB

english, 2005

27

[IEEE Conference Record of the Thirty-First IEEE Photovoltaic Specialists Conference - Lake buena Vista, FL, USA (3-7 Jan. 2005)] Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference, 2005. - High productivity in-line screen printing system for crystalline solar cell manufacturing

Bragagnolo, J.A., Ito, M., Sato, H., Akita, J., Hashimoto, T., Chikaki, Y.

Year:

2005

Language:

english

File:

PDF, 567 KB

english, 2005

28

Influence of Cu Electroplating Solution on Self-Assembled Porous Silica Low-k Films

Shimoyama, Masashi, Yagi, Ryotaro, Chikaki, Shinichi, Fujii, Nobutoshi, Nakayama, Takahiro, Kohmura, Kazuo, Tanaka, Hirofumi, Kinoshita, Keizo, Kikkawa, Takamaro

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 590 KB

english, 2006

29

CoWP as a Drift Barrier for Cu Ions Studied by Electric Measurements

Yoshino, Takenobu, Shimoyama, Masashi, Hata, Nobuhiro, Chikaki, Shinich, Yagi, Ryotaro, Shishida, Yoshinori, Kawahara, Jun, Kikkawa, Takamaro

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 133 KB

english, 2007

30

Ultralow-k/Cu Damascene Multilevel Interconnects Using High Porosity and High Modulus Self-Assembled Porous Silica

Chikaki, Shinichi, Kinoshita, Keizo, Kohmura, Kazuo, Tanaka, Hirofumi, Soda, Eiichi, Suzuki, Takamasa, Seino, Yutaka, Hata, Nobuhiro, Saito, Shuichi, Kikkawa, Takamaro

Journal:

Journal of The Electrochemical Society

Year:

2010

Language:

english

File:

PDF, 1000 KB

english, 2010

31

Electrical Reliabilities of Highly Cross-Linked Porous Silica Film with Cesium Doping

Kayaba, Yasuhisa, Kohmura, Kazuo, Tanaka, Hirofumi, Seino, Yutaka, Odaira, Toshiyuki, Nishiyama, Fumitaka, Kinoshita, Keizo, Chikaki, Shinichi, Kikkawa, Takamaro

Journal:

Journal of The Electrochemical Society

Year:

2008

Language:

english

File:

PDF, 892 KB

english, 2008

32

SPIE Proceedings [SPIE Optics East 2005 - Boston, MA (Sunday 23 October 2005)] Nanofabrication: Technologies, Devices, and Applications II - Self-assembled porous silica/Cu damascene interconnects for 45nm node and beyond

Kikkawa, T., Yagi, R., Chikaki, S., Shimoyama, M., Ono, T., Fujii, N., Kohmura, K., Tanaka, H., Nakayama, T., Ishikawa, A., Matsuo, H., Sonoda, Y., Hata, N., Seino, Y., Yoshino, T., Kinoshita, K., Lai

Year:

2005

Language:

english

File:

PDF, 1.25 MB

english, 2005

33

A Cu Electroplating Solution for Porous Low-k∕Cu Damascene Interconnects

Shimoyama, Masashi, Chikaki, Shinichi, Yagi, Ryotaro, Kohmura, Kazuo, Tanaka, Hirofumi, Fujii, Nobutoshi, Nakayama, Takahiro, Ono, Tetsuo, Ishikawa, Akira, Matsuo, Hisanori, Kinoshita, Keizo, Kikkawa,

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 588 KB

english, 2007

34

High-Etching-Selectivity Barrier SiC (k

J. Nakahira, S. Nagano, A. Gawase, Y. Ohashi, H. Shimizu, S. Chikaki, N. Oda, S. Kondo, S. Hasaka, S. Saito

Year:

2010

Language:

english

File:

PDF, 722 KB

english, 2010

35

Ammonium-Salt-Added Silica Slurry for the Chemical Mechanical Polishing of the Interlayer Dielectric Film Planarization in ULSI's

Y. Hayashi, M. Sakurai, T. Nakajima, K. Hayashi, S. Sasaki, S. Chikaki, T. Kunio

Year:

1995

Language:

english

File:

PDF, 254 KB

english, 1995

36

Integration of Self-Assembled Porous Silica in Low-k/Cu Damascene Interconnects

S. Chikaki, M. Shimoyama, R. Yagi, Y. Shishida, T. Yoshino, T. Ono, N. Fujii, N. Hata, T. Nakayama, Y. Sonoda, Y. Seino, K. Kinoshita, T. Kikkawa

Year:

2009

Language:

english

File:

PDF, 699 KB

english, 2009

37

Trench Sidewall Elimination Effect on Line-to-Line Leakage Current in Scalable Porous Silica ( k = 2.1)/Cu Interconnect Structure

Gawase, Akifumi, Chikaki, Shinichi, Nakamura, Naofumi, Soda, Eiichi, Oda, Noriaki, Saito, Shuichi

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 1009 KB

english, 2010

38

Effects of molecular mass of polymer and composition on the compressive properties of hydrogels composed of Laponite and sodium polyacrylate

Takeno, Hiroyuki, Sato, Chikaki

Journal:

Applied Clay Science

Year:

2016

Language:

english

File:

PDF, 1.47 MB

english, 2016

39

[IEEE Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference 2002 - New Orleans, LA, USA (19-24 May 2002)] Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002. - Processing of crystalline silicon solar cells in high throughput production tools

Bragagnolo, J.A., Akita, J., Sato, H., Chikaki, Y., Hashimoto, T., Ito, M., Sugiyama, I., Shea, S.P.

Year:

2002

Language:

english

File:

PDF, 385 KB

english, 2002

40

The Nucleation of Crystalline TiSi2 Phases from Amorphous TiSix Layers and Interfacial Layers

Tung, R. T., Fujii, K., Kikuta, K., Chikaki, S., Kikkawa, T.

Journal:

MRS Proceedings

Year:

1996

Language:

english

File:

PDF, 1.10 MB

english, 1996

41

The vascular plant-pathogenic bacterium R alstonia solanacearum produces biofilms required for its virulence on the surfaces of tomato cells adjacent to intercellular spaces

Mori, Yuka, Inoue, Kanako, Ikeda, Kenichi, Nakayashiki, Hitoshi, Higashimoto, Chikaki, Ohnishi, Kouhei, Kiba, Akinori, Hikichi, Yasufumi

Journal:

Molecular Plant Pathology

Year:

2016

Language:

english

File:

PDF, 767 KB

english, 2016

42

The Weight Change of Insects in Milk Powder

CHIKAKI, Hideya

Journal:

Food Hygiene and Safety Science (Shokuhin Eiseigaku Zasshi)

Year:

1975

File:

PDF, 396 KB

1975

43

The Insect Pests of Confectionery in Shimane Prefecture

SAITO, Koichi, CHIKAKI, Hideya

Journal:

Food Hygiene and Safety Science (Shokuhin Eiseigaku Zasshi)

Year:

1970

File:

PDF, 818 KB

1970

44

A magnetic probe equipped with small-tip permanent magnet for sentinel lymph node biopsy

Kaneko, Miki, Ohashi, Kaichi, Chikaki, Shinichi, Kuwahata, Akihiro, Shiozawa, Mikio, Kusakabe, Moriaki, Sekino, Masaki

Journal:

Year:

2017

Language:

english

File:

PDF, 4.54 MB

english, 2017

45

Three-dimensional sensitivity mapping of a handheld magnetic probe for sentinel lymph node biopsy

Kuwahata, Akihiro, Chikaki, Shinichi, Ergin, Aslı, Kaneko, Miki, Kusakabe, Moriaki, Sekino, Masaki

Journal:

Year:

2017

Language:

english

File:

PDF, 7.33 MB

english, 2017

46

Development of magnet configurations for magnetic immunostaining

Kaneko, Miki, Chikaki, Shinichi, Matsuda, Sachiko, Kuwahata, Akihiro, Namita, Masayuki, Saito, Itsuro, Sakamoto, Satoshi, Kusakabe, Moriaki, Sekino, Masaki

Journal:

Year:

2018

Language:

english

File:

PDF, 11.29 MB

english, 2018

47

ESR Studies of the Negative Ions of Hindered Methyl Biphenyls

ISHIZU, Kazuhiko, HASEGAWA, Hideo, CHIKAKI, Hisashi, NISHIGUCHI, Hiroaki, DEGUCHI, Yasuo

Journal:

The Journal of the Society of Chemical Industry Japan

Year:

1965

File:

PDF, 1.25 MB

1965

48

Development of device for quantifying magnetic nanoparticle tracers accumulating in sentinel lymph nodes

Kuwahata, Akihiro, Kaneko, Miki, Chikaki, Shinichi, Kusakabe, Moriaki, Sekino, Masaki

Journal:

Year:

2018

Language:

english

File:

PDF, 1.44 MB

english, 2018

49

Combined use of fluorescence with a magnetic tracer and dilution effect upon sentinel node localization in a murine model

Kuwahata, Akihiro, Ahmed, Muneer, Saeki, Kohei, Chikaki, Shinichi, Kaneko, Miki, Qiu, Wenqi, Xin, Zonghao, Yamaguchi, Shinji, Kaneko, Akiko, Douek, Michael, Kusakabe, Moriaki, Sekino, Masaki

Journal:

International Journal of Nanomedicine

Year:

2018

Language:

english

File:

PDF, 1.10 MB

english, 2018

50

Magnetically Promoted Rapid Immunofluorescence Staining for Frozen Tissue Sections

Onishi, Tatsuya, Matsuda, Sachiko, Nakamura, Yuki, Kuramoto, Junko, Tsuruma, Akinori, Sakamoto, Satoshi, Suzuki, Shunichi, Fuchimoto, Daiichiro, Onishi, Akira, Chikaki, Shinichi, Kaneko, Miki, Kuwahat

Journal:

Journal of Histochemistry & Cytochemistry

Year:

2019

Language:

english

File:

PDF, 1.33 MB

english, 2019